Quartz tuning fork temperature sensor is a kind of digital temperature sensor with frequency as the output signal, which has the advantages of high quality factor, small size and low power consumption, and plays an important role in the field of high accuracy temperature measurement. In order to improve the performance of quartz tuning fork resonator, this paper proposes a quartz tuning fork temperature sensor with cut ZYlw(-10°,-41°) and optimizes its surface electrodes in order to reduce the parasitic effects generated at the tuning fork base. Simulation results show that for a new cut quartz temperature sensor we propose, the optimized electrodes exhibit good resonance characteristics with improved sensitivity and quality factor Q compared to the before optimization, especially the Q value is improved significantly by 12%.

quartz tuning fork resonator, temperature sensor, electrode optimization, quality factor