The 34th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021) is one of the premier annual events reporting research results on all scientific aspects of Micro/Nanoscale Devices, Micro/Nanosystems, as well as their relevant technologies and industrial trends. This conference captures the rapid proliferation from the commitment and success of the multidisciplinary microsystems and nanotechnology research communities. In recent years, the annual IEEE MEMS Conference has attracted more than 700 participants, 800+ abstract submissions and has established the forum for presenting over 200 select papers in lecture and poster sessions. Its highly integrated format provides ample opportunities for interactions among attendees, presenters and exhibitors. While the current COVID-19 pandemic and global travel restrictions impose unprecedented challenges on having the conference in traditional fashion, the IEEE MEMS 2021 will be the first-ever online/virtual conference in this series, and will be the international forum where our multidisciplinary communities showcase our resilience and sustained endeavors, in advancing the field and venturing into new frontiers.
Sponsor Type:6
Philip Feng
University of Florida
USA
Niclas Roxhed
KTH Royal Institute of Technology
SWEDEN
Haixia "Alice" Zhang
Peking University
CHINA
The major areas of activities in the development of MEMS/NEMS solicited and expected at this conference include but are not limited to:
Design, simulation and analysis tools with experimental verification
Fabrication technologies and processes
Silicon and beyond-silicon materials (e.g., piezoelectric, ferroelectric, wide-bandgap, 2D materials, soft materials, composites, etc.)
Electro-mechanical integration techniques
Assembly and packaging approaches
Metrology and operational evaluation techniques
System architectures
01月25日
2021
01月29日
2021
初稿截稿日期
注册截止日期
2019年01月27日 韩国 Seoul
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems2017年01月22日 美国 Las Vegas,USA
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems2016年01月24日 中国 Shanghai, China
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems2015年01月18日 葡萄牙
2015年第28届IEEE微机电系统国际会议2013年01月20日 中国 台北市
2013年IEEE第26届微机电系统国际会议
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